Nettet1. okt. 2024 · Fig. 1 (a) and (b) shows the configuration of the cosine-shaped Y-branch optical waveguide and the straight optical waveguide used in this paper. In our design, top width W of the cosine-shaped Y-branch waveguide and straight waveguide is set to be 3 μm and 800 nm, respectively. And in order to improve the coupling efficiency, the input … Nettet8. jun. 2014 · June 8, 2014 by. Reactive Ion Etching (RIE) Basics. A disadvantage of wet etching is the undercutting caused by the isotropy–lateral etching at the same rate as the vertical etch. The …
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NettetLithium Niobate. Lithium Niobate (LiNbO 3) is used in Surface Acoustic Wave (SAW) and related devices used in the communications industry. LiNbO 3 and its related films may … Nettet2. aug. 2024 · Then, the standard dry-etching process by using the inductively coupled plasma-reactive ion etching (ICP-RIE) tools was employed (by SPTS DRIE-I), to etch the a-Si hard mask by the SF 6 and C 4 F 8 mixed gases, and the residual resist was removed by wet etching with the acetone solutions, and then the sample was treated with the … orcas athletic center
Highly-efficient thin film LiNbO3 surface couplers connected by …
Nettet20. mar. 2024 · Si Etching (Fluorine ICP Etcher) SiVertHF - Si Vertical Etch using C 4 F 8 /SF 6 /CF 4 and resist mask . Etch Rates: Si ≈ 300-350 nm/min; SiO 2 ≈ 30-35 nm/min; … NettetThe etching characteristics of LiNbO 3 and LiTaO 3 single crystals have been investigated by performing plasma reactive ion etching (RIE) with CF 4 /Ar, CF 4 /H 2, … NettetPlasmaPro 100 Cobra ICP RIE Etch. The PlasmaPro 100 Cobra ICP RIE system utilises a high-density inductively coupled plasma to achieve fast etch rates. The process modules offer excellent uniformity, high … orcas christian